A User's Guide to Ellipsometry
(eBook)

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Published
Dover Publications, 2013.
Format
eBook
Language
English
ISBN
9780486151922

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Citations

APA Citation, 7th Edition (style guide)

Harland G. Tompkins., & Harland G. Tompkins|AUTHOR. (2013). A User's Guide to Ellipsometry . Dover Publications.

Chicago / Turabian - Author Date Citation, 17th Edition (style guide)

Harland G. Tompkins and Harland G. Tompkins|AUTHOR. 2013. A User's Guide to Ellipsometry. Dover Publications.

Chicago / Turabian - Humanities (Notes and Bibliography) Citation, 17th Edition (style guide)

Harland G. Tompkins and Harland G. Tompkins|AUTHOR. A User's Guide to Ellipsometry Dover Publications, 2013.

MLA Citation, 9th Edition (style guide)

Harland G. Tompkins, and Harland G. Tompkins|AUTHOR. A User's Guide to Ellipsometry Dover Publications, 2013.

Note! Citations contain only title, author, edition, publisher, and year published. Citations should be used as a guideline and should be double checked for accuracy. Citation formats are based on standards as of August 2021.

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Grouped Work ID1a3ccf05-2edc-387e-3262-579f74baef4b-eng
Full titleusers guide to ellipsometry
Authortompkins harland g
Grouping Categorybook
Last Update2024-02-29 09:11:11AM
Last Indexed2024-03-27 02:23:40AM

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First LoadedNov 12, 2023
Last UsedFeb 25, 2024

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    [synopsis] => This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry - particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
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